First I'm going to do the calculation in polar coordinates, because it is far easier to not make a mistake in this context. This will help reassure us that my calculation in Cartesian coordinates is valid.
$$d\vec{l} = R d\theta \Big( -\sin(\theta)\hat{x} + \cos(\theta)\hat{y} \Big)$$
$$ \hat{r}' = - \frac{R}{\sqrt{R^2+a^2}} \cos(\theta)\hat{x} - \frac{R}{\sqrt{R^2+a^2}} \sin(\theta) \hat{y} + \frac{a}{\sqrt{R^2+a^2}} \hat{z} $$
$$ d\vec{l}\times \hat{r}' =
\left| \begin{array}{ccc} \
\hat{x} & \hat{y} & \hat{z} \\
-d\theta \ R\sin(\theta) & d\theta \ R\cos(\theta) & 0 \\
- \frac{R}{\sqrt{R^2+a^2}} \cos(\theta) & - \frac{R}{\sqrt{R^2+a^2}} \sin(\theta) & \frac{a}{\sqrt{R^2+a^2}}
\end{array} \right|$$
$$ = \frac{1}{\sqrt{R^2+a^2}} d\theta \Big( Ra \cos(\theta)\hat{x} + Ra\sin(\theta) \hat{y} + R^2 \hat{z} \Big)$$
The magnetic field is then,
$$ \vec{B} = \frac{\mu_0 I }{4\pi} \int_{0}^{2\pi} \frac{ d\theta}{(R^2+a^2)^{3/2}} \Big( Ra \cos(\theta)\hat{x} + Ra\sin(\theta) \hat{y} + R^2 \hat{z} \Big)$$
$$ = \frac{\mu_0 I }{4\pi} \int_{0}^{2\pi} \frac{d\theta}{(R^2+a^2)^{3/2}} \Big( 0+0 + R^2 \hat{z} \Big)$$
$$ = \frac{\mu_0 I }{4\pi} \frac{2\pi}{(R^2+a^2)^{3/2}} \Big( R^2 \hat{z} \Big)$$
$$ = \frac{\mu_0 I }{2} \frac{R^2 }{(R^2+a^2)^{3/2}} \ \hat{z} $$
As you said the equation of the circle is $x^2+y^2=R^2$ which allows us to compute $d\vec{l}$ using derivatives.
$$d\vec{l} = dx \ \hat{x} + dy \ \hat{y} + 0 \ \hat{z} = dx \ \hat{x} + y'(x) dx \ \hat{y} + 0 \ \hat{z} = dx \ \hat{x} \mp \frac{x dx}{\sqrt{R^2-x^2}} \hat{y} + 0 \ \hat{z}$$
$$\boxed{ d\vec{l} = dx \ \Big( \hat{x} \mp \frac{x }{\sqrt{R^2-x^2}} \hat{y} + 0 \ \hat{z} \Big)}$$
Where the $-$ corresponds to $y>0$ and the $+$ corresponds to $y<0$.
Let the element of current be located at $(x,y(x),0)$ then the unit vector which points from \hat{r}' is given by,
$$ \boxed{\hat{r}' = \frac{-x \ \hat{x} \mp \sqrt{R^2-x^2} \ \hat{y} + a\hat{z}}{\sqrt{R^2+a^2}}} $$
where the $-$ corresponds to $y>0$ and the $+$ corresponds to $y<0$.
$$ d\vec{l} \times \hat{r}' =
\left| \begin{array}{ccc} \ \hat{x} & \hat{y} & \hat{z} \\
dx & \mp \frac{x dx}{\sqrt{R^2-x^2}} & 0 \\
\frac{-x}{\sqrt{R^2+a^2}} & \mp \frac{\sqrt{R^2-x^2}}{\sqrt{R^2+a^2}} & \frac{a}{\sqrt{R^2+a^2}}\end{array} \right|$$
$$ = \hat{x}\Big(\mp \frac{x dx}{\sqrt{R^2-x^2}}\frac{a}{\sqrt{R^2+a^2}} - 0 \Big) - \hat{y}\Big( dx \ \frac{a}{\sqrt{R^2+a^2}} - 0 \Big) + \hat{z}\Big( \mp dx \frac{\sqrt{R^2-x^2}}{\sqrt{R^2+a^2}} \pm \frac{x dx}{\sqrt{R^2-x^2}} \frac{-x}{\sqrt{R^2+a^2}}\Big)$$
$$ \boxed{ d\vec{l} \times \hat{r}'= \mp \hat{x} \frac{xa dx}{\sqrt{R^2-x^2}\sqrt{R^2+a^2}} - \hat{y} \ \frac{a\ dx}{\sqrt{R^2+a^2}} \mp\hat{z} \ dx \frac{R^2}{\sqrt{R^2-x^2}\sqrt{R^2+a^2}} }$$
There will be two contributions to the magnetic field. One from the top semicircle and one from the bottom semicircle.
$$ \vec{B}_{top} = \frac{\mu_0 I}{4\pi} \frac{1}{R^2+a^2}\int_{R}^{-R} \Big(- \hat{x} \frac{xa dx}{\sqrt{R^2-x^2}\sqrt{R^2+a^2}} - \hat{y} \ \frac{a\ dx}{\sqrt{R^2+a^2}} -\hat{z} \ dx \frac{R^2}{\sqrt{R^2-x^2}\sqrt{R^2+a^2}} \Big) $$
$$= \frac{\mu_0 I}{4\pi} \frac{1}{R^2+a^2} \Big(0 - \hat{y} \ \frac{a\ (-2R)}{\sqrt{R^2+a^2}} - \hat{z} \ \frac{-\pi R^2}{\sqrt{R^2+a^2}}\Big) $$
$$= \frac{\mu_0 I}{4\pi} \frac{1}{R^2+a^2} \Big( \hat{y} \ \frac{2aR}{\sqrt{R^2+a^2}} +\hat{z} \ \frac{\pi R^2}{\sqrt{R^2+a^2}}\Big) $$
$$ \vec{B}_{bottom} = \frac{\mu_0 I}{4\pi} \frac{1}{R^2+a^2}\int_{R}^{-R} \Big( \hat{x} \frac{xa dx}{\sqrt{R^2-x^2}\sqrt{R^2+a^2}} - \hat{y} \ \frac{a\ dx}{\sqrt{R^2+a^2}} \hat{z} \ dx \frac{R^2}{\sqrt{R^2-x^2}\sqrt{R^2+a^2}} \Big) $$
$$ \vec{B}_{bottom} = \frac{\mu_0 I}{4\pi} \frac{1}{R^2+a^2} \Big(0 - \hat{y} \ \frac{2aR}{\sqrt{R^2+a^2}} +\hat{z} \ \frac{\pi R^2}{\sqrt{R^2+a^2}} \Big) $$
$$ \vec{B}_{bottom} = \frac{\mu_0 I}{4\pi} \frac{1}{R^2+a^2} \Big( \hat{y} \ \frac{-2aR}{\sqrt{R^2+a^2}} +\hat{z} \ \frac{\pi R^2}{\sqrt{R^2+a^2}} \Big) $$
And the complete magnetic field is,
$$\vec{B} = \vec{B}_{top}+\vec{B}_{bottom} $$
$$\vec{B} = \frac{\mu_0 I}{4\pi} \frac{1}{R^2+a^2} \Big( \ \frac{2\pi R^2}{\sqrt{R^2+a^2}} \Big)\ \hat{z} $$
$$\vec{B} = \frac{\mu_0 I}{2} \frac{R^2}{(R^2+a^2)^{3/2}} \ \hat{z} $$